Analytical performance of μ-groove silicon attenuated total reflection waveguides

文献情報

出版日 2019-04-05

DOI 10.1039/C9AN00417C

インパクトファクター 4.616

著者

Julian Haas, Anja Müller, Lorenz Sykora, Boris Mizaikoff

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要旨

The analytical performance of micromachined μ-groove silicon attenuated total reflection (ATR) elements has been evaluated in a comparison of Fourier-transform infrared (FTIR) and quantum cascade laser (QCL) spectroscopy operating at mid-infrared (MIR) wavelengths. μ-Groove silicon ATR elements are highly efficient micromachined waveguides fabricated at a wafer scale at such low cost that they may be considered a consumable for single-time-use, e.g., in medical application scenarios. Herein, exemplary analytes haven been used for reliably evaluating their analytical performance (i.e., acetate and carbonate) in terms of sensitivity, noise level, and achievable limits of detection in a comparison of broadband vs. narrowband infrared spectroscopy.

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Analytical performance of μ-groove silicon attenuated total reflection waveguides

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