Catalytic conversion of carbon-containing impurity methyldichlorosilane to purify raw material trichlorosilane of polysilicon production
文献情報
Qiang Geng, Guoqiang Huang
In order to remove the main carbon impurity methyldichlorosilane from the raw material trichlorosilane used in the production of polysilicon, a catalytic reaction was used to convert it into methyltrichlorosilane with higher boiling point. The catalytic conversion of methyldichlorosilane was carried out by using low-cost materials with different structural properties as catalysts. The three most commonly used low-cost commercial catalysts, A100 resin, activated carbon (AC) and AlCl3, were selected. The physicochemical properties of these low-cost catalysts were characterized by SEM, TEM, BET, XRD and TG technology. The catalytic effects of A100 resin, AC and AlCl3 were compared in a fixed-bed reactor with polysilicon manufacture by-product silicon tetrachloride as the chlorine source. The main focus is to investigate the effects of reaction temperature, molar ratio of reactants, liquid hourly space velocity (LHSV), and catalyst stability on the conversion of methyldichlorosilane. The results show that the AC catalyst had better catalytic effect than AlCl3 and A100 resin catalysts. The optimum process conditions were reaction temperature 140 °C, n(methyldichlorosilane) : n(silicon tetrachloride) = 1 : 3, and liquid hourly space velocity of 3.0 h−1. The maximum conversion of methyldichlorosilane is close to 85% under the optimal process conditions. The conversion rate of methyldichlorosilane did not decrease significantly after 120 h, still about 70%, indicating the good catalytic stability of the AC catalyst. Finally, the reaction mechanism of free radical reaction is well explained.
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Bioorganic & Medicinal Chemistry Letters

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Critical Reviews in Solid State and Materials Sciences

Herald of the Russian Academy of Sciences

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Polycyclic Aromatic Compounds
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Reaction Chemistry & Engineering

Reaction Chemistry & Engineering is an interdisciplinary journal reporting cutting-edge research focused on enhancing the understanding and efficiency of reactions. Reaction engineering leverages the interface where fundamental molecular chemistry meets chemical engineering and technology. Challenges in chemistry can be overcome by the application of new technologies, while engineers may find improved solutions for process development from the latest developments in reaction chemistry. Reaction Chemistry & Engineering is a unique forum for researchers whose interests span the broad areas of chemical engineering and chemical sciences to come together in solving problems of importance to wider society. All papers should be written to be approachable by readers across the engineering and chemical sciences. Papers that consider multiple scales, from the laboratory up to and including plant scale, are particularly encouraged.




