Self-assembly of block copolymers on lithographically patterned template with ordered posts

文献情報

出版日 2015-11-03

DOI 10.1039/C5CP05449D

インパクトファクター 3.676

著者

Dan Xu, Yao-Hong Xue, Yan-Bo Sun

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要旨

Dissipative particle dynamics simulations are employed to study the self-assembly of block copolymers on a template modified with ordered posts. Templates with hexagonally arranged and rectangularly arranged posts are both studied. For the systems with hexagonally arranged posts, morphologies with bending alignments are seen most often. We find that the different kinds of patterns, which can be directly observed in experiments, are substantially induced by the pattern of the bottom layer. In the simulations with a template modified with rectangularly arranged posts, by finely adjusting the distances between neighboring posts in both x and y directions, mesh-shaped structures with different angles between the bottom and the sub-bottom layers can be obtained. These results shed light on the better design of lithographically patterned materials on the scale of 10 nm via the directed self-assembly of BCPs by templating.

掲載誌

Physical Chemistry Chemical Physics

CiteScore: 5.5

自己引用率: 10.3%

年間論文数: 3036

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