Effects of trace metals and organic additives on porosity and dielectric constant of high purity mesoporous silica films
文献情報
Jerome C. Birnbaum, Glen E. Fryxell, Xiaohong Li, Chris A. Coyle, Glen C. Dunham, Suresh Baskaran
The beneficial effects that alkali metal and alkylammonium salt additions to molecularly templated silica sols have on the resulting mesoporous silica films formed from evaporative-coating methods with respect to porosity, elastic modulus, dielectric constant, and film surface uniformity were investigated and identified.
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