Reactive scattering study of etching dynamics: HCl on GaAs(100)

文献情報

出版日 2000-01-07

DOI 10.1039/A907410D

インパクトファクター 3.676

著者

Johnathan Essex-Lopresti, Weijie Jia, Simon Munro, Peter A. Gorry

原文を見る

要旨

Pulsed supersonic molecular beam scattering has been used to study the inelastic scattering, trapping + desorption and reactive channels for the HCl + GaAs(100) thermal etching reactions. Temperature profiles of the reaction products GaCl, As2 and Ga are reported in the range 600 to 883 K. Angular and time-of-flight (TOF) distributions of inelastically scattered and trapped + desorbed HCl are also reported. Angular distribution of all reaction products are described by a cosn (θ) form with 0.95⩽n⩽1.4. The TOF distribution of GaCl reveals rapid production but with measurable time delay (50 μs–10 ms). The As2 signals are effectively demodulated and correspond to delayed production on the surface with a time constant >1 s. A kinetic model initially proposed by Bent and colleagues (C. Su, Z. Dai, W. Luo, D. Sun, M. F. Vernon and B. E. Bent, Surf. Sci., 1994, 312, 181) is extended and provides excellent fits to the temperature profiles and the surface residence times for GaCl and As2.

掲載誌

Physical Chemistry Chemical Physics

CiteScore: 5.5

自己引用率: 10.3%

年間論文数: 3036

Physical Chemistry Chemical Physics (PCCP) is an international journal co-owned by 19 physical chemistry and physics societies from around the world. This journal publishes original, cutting-edge research in physical chemistry, chemical physics and biophysical chemistry. To be suitable for publication in PCCP, articles must include significant innovation and/or insight into physical chemistry; this is the most important criterion that reviewers and Editors will judge against when evaluating submissions. The journal has a broad scope and welcomes contributions spanning experiment, theory, computation and data science. Topical coverage includes spectroscopy, dynamics, kinetics, statistical mechanics, thermodynamics, electrochemistry, catalysis, surface science, quantum mechanics, quantum computing and machine learning. Interdisciplinary research areas such as polymers and soft matter, materials, nanoscience, energy, surfaces/interfaces, and biophysical chemistry are welcomed if they demonstrate significant innovation and/or insight into physical chemistry. Joined experimental/theoretical studies are particularly appreciated when complementary and based on up-to-date approaches.